The Deposition and Characterization of 10 nm Thick Teflon-like Anti-stiction Films for the Hot Embossing
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چکیده
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ژورنال
عنوان ژورنال: Korean Journal of Materials Research
سال: 2005
ISSN: 1225-0562
DOI: 10.3740/mrsk.2005.15.3.149